top of page

Semiconductor Diffusion Heater Main Product Page

DS Fibertech Corporation is a world leader in the manufacturing of semiconductor diffusion heaters. Each year, we supply thousands of direct replacement diffusion furnace heater elements to wafer fabs and semiconductor foundries across the globe. Currently, we support close to 100 fabrication facilities, OEMs, and contract maintenance providers, in countries located throughout North America, Asia, Europe, and Australia.  DS Fibertech Corporation also provides refurbisment and burn-in services.


Please click on links to view various model configurations, features, and cross-sections.

Diffusion Furnace Wafer Boat

DS Fibertech Corporation offers direct replacements of diffusion heater elements from OEMs, such as:


Tokyo Electron (TEL):

VMM-56-002APM, VMM-56-201APM, VMM-40-101APM, VMM40-102APM, VMU-40-102EXAPM, VMM-35-001APM, VMM-35-002APM, VMU-54-001APM, VMU-40-009APM, VMU40-007APM, VMU-40-007EXAPM, VMU-40-007SEAPM, VMU-40-003APM, VMU-28-017APM, VMU-28-014APM, VOS-56-003, VOS-56-002, VOS-40-017, VMU-40-007, VMU-40-103, VMM-40-101, VMM-40-102, VMM-40-005, VMU-28-017, VMU-54-001


Hitachi Kokusai:

F-330C-88V-4Z, F-330C-93V-4Z, D4EX04882, D4EX03531, D4EX02648





Silicon Valley Group (SVG):

602783-02, 602783-03


Various Other OEM Models:

UL-260-08H-MK3(W), HDS-610A5-C, F-210V-87, FC-200, FC200L, DC-1300, DC-1300PLUS, DCHT-500


If you are looking for a diffusion heater that is not listed, please contact us.

bottom of page