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Semiconductor Diffusion Heater Main Product Page
DS Fibertech Corporation is a world leader in the manufacturing of semiconductor diffusion heaters. Each year, we supply thousands of direct replacement diffusion furnace heater elements to wafer fabs and semiconductor foundries across the globe. Currently, we support close to 100 fabrication facilities, OEMs, and contract maintenance providers, in countries located throughout North America, Asia, Europe, and Australia. DS Fibertech Corporation also provides refurbisment and burn-in services.
Please click on links to view various model configurations, features, and cross-sections.
DS Fibertech Corporation offers direct replacements of diffusion heater elements from OEMs, such as:
Tokyo Electron (TEL):
VMM-56-002APM, VMM-56-201APM, VMM-40-101APM, VMM40-102APM, VMU-40-102EXAPM, VMM-35-001APM, VMM-35-002APM, VMU-54-001APM, VMU-40-009APM, VMU40-007APM, VMU-40-007EXAPM, VMU-40-007SEAPM, VMU-40-003APM, VMU-28-017APM, VMU-28-014APM, VOS-56-003, VOS-56-002, VOS-40-017, VMU-40-007, VMU-40-103, VMM-40-101, VMM-40-102, VMM-40-005, VMU-28-017, VMU-54-001
Hitachi Kokusai:
F-330C-88V-4Z, F-330C-93V-4Z, D4EX04882, D4EX03531, D4EX02648
Axcelis:
ST-200
Silicon Valley Group (SVG):
602783-02, 602783-03
Various Other OEM Models:
UL-260-08H-MK3(W), HDS-610A5-C, F-210V-87, FC-200, FC200L, DC-1300, DC-1300PLUS, DCHT-500
If you are looking for a diffusion heater that is not listed, please contact us.
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