Semiconductor Diffusion Heater Main Product Page
DS Fibertech Corporation is a world leader in the manufacturing of semiconductor diffusion heaters. Each year, we supply thousands of direct replacement diffusion furnace heater elements to wafer fabs and semiconductor foundries across the globe. Currently, we support close to 100 fabrication facilities, OEMs, and contract maintenance providers, in countries located throughout North America, Asia, Europe, and Australia. DS Fibertech Corporation also provides refurbisment and burn-in services.
Please click on links to view various model configurations, features, and cross-sections.
DS Fibertech Corporation offers direct replacements and refurbishment of diffusion heater elements from OEMs, such as:
Tokyo Electron (TEL):
1110-356908-11, 1187-149702-14, 400-917700 , B723001, DITEA8668, DS1187-016965-18, DS1187-149702-13, DS1187-149702-14, DS2184-020417-11, DS2187-323542-14, DS2187-323542-19, DS2187-333792-18, DS218H-020278-1A, DS218H-033374-13, DS218H-033374-14, DS218H-033374-14, DS518H-001519-16, DS618H-000249-12, VB410.320.54TEL, VMM-35-001APM, VMM-35-001APM, VMM-35-002APM, VMM-35-002APM, VMM-40-005, VMM-40-101, VMM-40-101APM, VMM-40-102, VMM-40-102APM, VMU-28-014, VMU-28-014APM, VMU-28-017, VMU-28-017APM, VMU-40-102EXAPM, VMM-40-005, VMM-40-101, VMM-40-102, VMM-40-104, VMM-56-002, VMM-56-002APM, VMM-56-201, VMM-56-201APM, VMM-56-306, VMM-56-306, VMU-28-017, VMU-28-031, VMU-31-001, VMU-40-003, VMU-40-003APM, VMU-40-007, VMU-40-007APM, VMU-40-007EX, VMU-40-007EXAPM, VMU-40-007EX2, VMU-40-007EXT/41, VMU-40-007RTR, VMU-40-007SE, VMU-40-007SEAPM, VMU-40-009, VMU-40-009APM, VMU-40-102EX2, VMU-40-103, VMU-54-001, VMU-54-001APM, VOS-40-017, VOS-56-002, VOS-56-003, VOS-56-101P, VOS-56-101PT
Hitachi Kokusai:
2962044, 2962079, 9650700, 9651700, 440919578, 040-917212, 044-906430, 2PBTIF47000, 3HOT046402, 3HOT052004, D4EX02648, D4EX02739, D4EX03531, D4EX04882, D4EX19087, D4EX204497, D4EX20739, D4EX22250, D4EX30455-001, D4EX34221-004, F-330C-88V-4Z, F-330C-93V-4Z, T2DD6-18821-40536
ASM:
2307960, 2421801-01, 2579138-01, 2580802-01, 2625458-01, 2713209-01, 2842955-01, 2912414-01, 2947056-01, 2963558-01
Centrotherm:
627396, 099622.201.20.09.1
MRL:
044-0789927, 400792553, 440787004, 440816786, 440818242, 440818566, 3740816554, 4020790208, 044-919578, 040-082325, 040-800375, 040-82331, 040-906444, 040-917212, 042-817821, 042-818161, 042-915196, 044-0799107, 044-800207, 044-906360, 044-906430, 044-907349, 044-908906, 044-924638, 400-093646, 400-901802, X0440786265
BTI:
2962044, 4016647, 4230484, 4230485, 9004700, 9051623, 9051885, 9650851, 9651035, 9651700, 9651765, 9651769, 9651770, 9651771, 9652103, 9652267, 9652268, 9652269, 9652293, 9652649, 602783-02
Axcelis:
ST-200
Silicon Valley Group (SVG):
4011004, 602783-02, 602783-03
Thermco:
165558-001, AD-11033, AD1388DC1300P, AD1389-FC200, AD-1538DCHT500
Various Other OEM Models:
A133-0001-120, A133-0001-121, A133-0001-122, A133-0001-122, A133-0001-123, A133-0001-123, A133-0001-133, A133-0001-134, A133-0001-134, A133-0001-139, A133-0001-142, A133-0001-144, A133-0001-144, A133-0001-145, A133-0001-145, A133-0001-146, A133-0001-147, A133-0001-148, A133-0001-193, A133-0001-194, A133-0001-195, A133-0001-196, A133-0001-197, A133-0001-198, A133-0001-199, A133-0001-201, A133-0004-001, A133-0004-034, A133-0004-035, A133-0004-036, A133-0004-037, A133-0004-038, A133-0004-039, UL-260-08H-MK3(W), HDS-610A5-C, F-210V-87, FC-200